Package structure

ABSTRACT

A package structure includes a substrate, a semiconductor device and an adhesive layer. The semiconductor device is disposed on the substrate, wherein an angle θ is formed between one sidewall of the semiconductor device and one of sides of the substrate, 0°&lt;θ&lt;90°. The adhesive layer surrounds the semiconductor device on the substrate and at least continuously disposed at two of the sides of the substrate, wherein the adhesive layer has a first opening misaligned with a corner of the semiconductor device closest to the first opening.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 16/805,869, filed onMar. 2, 2020 and now allowed, which claims the priority benefit of U.S.provisional application Ser. No. 62/906,739, filed on Sep. 27, 2019. Theentirety of the above-mentioned patent applications is herebyincorporated by reference herein and made a part of this specification.

BACKGROUND

Semiconductor devices and integrated circuits used in a variety ofelectronic apparatus, such as cell phones and other mobile electronicequipment, are typically manufactured on a single semiconductor wafer.The dies of the wafer may be processed and packaged with othersemiconductor devices or dies at the wafer level, and varioustechnologies and applications have been developed for wafer levelpackaging. With high integration density, heat dissipation is achallenge in the semiconductor packages. In general, a heatsink may beattached onto the semiconductor package so as to improving the heatdissipation of the semiconductor package. However, there are manychallenges related to attach the heatsink onto the semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A through 1D schematically illustrate cross-sectional views formanufacturing a package structure in accordance with some embodiments ofthe disclosure.

FIGS. 2A through 2C are a schematic top view of a manufacturing methodof the package structure in FIGS. 1A through 1C, respectively.

FIG. 3A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure.

FIG. 3B is a schematic top view of the package structure in FIG. 3A.

FIG. 4A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure.

FIG. 4B is a schematic top view of the package structure in FIG. 4A.

FIG. 5A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure.

FIG. 5B is a schematic top view of the package structure in FIG. 5A.

FIG. 6A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure.

FIG. 6B is a schematic top view of the package structure in FIG. 6A.

FIGS. 7A and 7B schematically illustrate top views for manufacturing apackage structure in accordance with some embodiments of the disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3D-IC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3D-IC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good first dies to increase the yield and decreasecosts.

FIGS. 1A through 1D schematically illustrate cross-sectional views formanufacturing a package structure in accordance with some embodiments ofthe disclosure. FIGS. 2A through 2C are a schematic top view of amanufacturing method of the package structure in FIGS. 1A through 1C,wherein FIGS. 1A through 1C are schematic cross-sectional views alonglines I-I′ of FIGS. 2A through 2C, respectively.

Referring to FIGS. 1A and 2A, a semiconductor device 100 is provided.The semiconductor device 100 is a die or a semiconductor package (e.g.System on a Chip package). In some embodiments, the semiconductor device100 is a die including an integrated circuit 102 and connecting pads 104formed on an active surface of the integrated circuit 102. In certainembodiments, the connecting pads 104 may further include pillarstructures for bonding the semiconductor device 100 to other structures.

A substrate 120 is provided. The substrate 120 includes connecting pads122, connecting pads 124, metallization layers 126, and vias (notshown). In some embodiments, the connecting pads 122 and the connectingpads 124 are respectively distributed on two opposite sides of thesubstrate 120, and are exposed for electrically connecting with otherelements/features. In some embodiments, the metallization layers 126 andthe vias are embedded in the substrate 120 and together provide routingfunction for the substrate 120, and the metallization layers 126 and thevias are electrically connected to the connecting pads 122 and theconnecting pads 124. In other words, at least some of the connectingpads 122 are electrically connected to some of the connecting pads 124through the metallization layers 126 and the vias. In some embodiments,the materials of the connecting pads 122 and the connecting pads 124 mayinclude metal. In some embodiments, the materials of the metallizationlayers 126 and the vias may be substantially the same or similar to thematerial of the connecting pads 122 and the connecting pads 124. In someembodiments, the substrate 120 may include an organic flexible substrateor a printed circuit board.

Then, the semiconductor device 100 is bonded onto a substrate 120. Insome embodiments, a plurality of electrical connectors 130 are locatedbetween the semiconductor device 100 and the substrate 120 for bonding.In some embodiments, the semiconductor device 100 is attached onto thesubstrate 120, for example, through flip-chip bonding by way of theelectrical connectors 130. Through the reflow process, the connectingpads 122 and connecting pads 104 are jointed to the electricalconnectors 130, so as to electrically connect the semiconductor device100 to the substrate 120. In some embodiments, the electrical connectors130 are solder bumps, lead-free solder bumps, or micro bumps, such ascontrolled collapse chip connection (C4) bumps or micro bumps containingcopper pillars. In some embodiments, the semiconductor device 100 isbonded onto the substrate 120 to form a stacked structure.

As shown in FIG. 2A, an angle θ is formed between one sidewall of thesemiconductor device 100 and one sidewall of the substrate 120, wherein0°<θ<90°. In some embodiments, the semiconductor device 100 is squareshape or rectangular shape and includes a first sidewall 100 a, a secondsidewall 100 b, a third sidewall 100 c, and a fourth sidewall 100 d.Similarly, the substrate 120 is square shape or rectangular shape andincludes a first sidewall 120 a, a second sidewall 120 b, a thirdsidewall 120 c, and a fourth sidewall 120 d. Acute angles (e.g. θ ) areformed between the first sidewall 100 a and each of the first to fourthsidewalls 120 a-120 d, between the second sidewall 100 b and each of thefirst to fourth sidewalls 120 a-120 d , between the third sidewall 100 cand each of the first to fourth sidewalls 120 a-120 d, and between thefourth sidewall 100 d and each of the first to fourth sidewalls 120a-120 d. In some embodiments, the angles θ are about 45 degrees.

A corner C1 is formed between the first and second sidewalls 100 a and100 b, and the corner C1 is nearer to the first sidewall 120 a of thesubstrate 120 than to the second to fourth sidewalls 120 b-120 d of thesubstrate 120. A shortest distance D1 between the corner C1 and thefirst sidewall 120 a is smaller than a shortest distance between thefirst sidewall 100 a and the first sidewall 120 a and a shortestdistance between the second sidewall 100 b and the first sidewall 120 a.In other words, the corner C1 is the nearest location of thesemiconductor device 100 to the first sidewall 120 a of the substrate120, and the first sidewall 120 a is also referred to as the respectivesidewall of the corner C1.

A corner C2 is formed between the second and third sidewalls 100 b and100 c, and the corner C2 is nearer to the second sidewall 120 b of thesubstrate 120 than to the first, third, and fourth sidewalls 120 a, 120c, 120 d of the substrate 120. A shortest distance D2 between the cornerC2 and the second sidewall 120 b is smaller than a shortest distancebetween the second sidewall 100 b and the second sidewall 120 b and ashortest distance between the third sidewall 100 c and the secondsidewall 120 b. In other words, the corner C2 is the nearest location ofthe semiconductor device 100 to the second sidewall 120 b of thesubstrate 120, and the second sidewall 120 b is also referred to as therespective sidewall of the corner C2.

A corner C3 is formed between the third and fourth sidewalls 100 c and100 d, and the corner C3 is nearer to the third sidewall 120 c of thesubstrate 120 than to the first, second, and fourth sidewalls 120 a, 120b, 120 d of the substrate 120. A shortest distance D3 between the cornerC3 and the third sidewall 120 c is smaller than a shortest distancebetween the third sidewall 100 c and the third sidewall 120 c and ashortest distance between the fourth sidewall 100 d and the thirdsidewall 120 c. In other words, the corner C3 is the nearest location ofthe semiconductor device 100 to the third sidewall 120 c of thesubstrate 120, and the third sidewall 120 c is also referred to as therespective sidewall of the corner C3.

A corner C4 is formed between the first and fourth sidewalls 100 a and100 d, and the corner C4 is nearer to the fourth sidewall 120 d of thesubstrate 120 than to the first to third sidewalls 120 a-120 c of thesubstrate 120. A shortest distance D4 between the corner C4 and thefourth sidewall 120 d is smaller than a shortest distance between thefirst sidewall 100 a and the fourth sidewall 120 d and a shortestdistance between the fourth sidewall 100 d and the fourth sidewall 120d. In other words, the corner C4 is the nearest location of thesemiconductor device 100 to the fourth sidewall 120 d of the substrate120, and the fourth sidewall 120 d is also referred to as the respectivesidewall of the corner C4. In some embodiments, the shortest distancesD1-D4 are in a range of 2 mm to 12 mm.

As mentioned above, the shortest distances D1-D4 between thesemiconductor device 100 and the substrate 120 are formed between thecorners C1-C4 of the semiconductor device 100 and the respectivesidewalls 120 a-120 d of the substrate 120. That is, the shortestdistance between the first to fourth sidewalls 120 a-120 d of thesubstrate 120 and the corners C1-C4 of the semiconductor device 100 issmaller than a shortest distance between the first to fourth sidewalls100 a-100 d of the semiconductor device 100 and the first to fourthsidewalls 120 a-120 d of the substrate 120.

Base on the arrangement of the semiconductor device 100, a routingregion of a circuit on the substrate 120 may be evenly distributed. Thatis, the integration of the circuit disposed on the substrate 120 may beincreased.

In some embodiments, the semiconductor device 100 and the substrate 120are both square shape, and the corners C1-C4 of the semiconductor device100 are respectively substantially aligned with middles of the first tofourth sidewalls 120 a-120 d of the substrate 120. However, thedisclosure is not limited thereto. In other embodiments, one of thesemiconductor device 100 and the substrate 120 is square shape and theother of the semiconductor device 100 and the substrate 120 isrectangular shape.

After bonding, an underfill structure 140 may be formed between thesemiconductor device 100 and the substrate 120. The underfill structure140 may cover the electrical connectors 130 and fill up the spacesbetween the semiconductor device 100 and the substrate 120, so as toprotect the electrical connectors 130 between the connecting pads 104and the connecting pads 122. In other embodiments, the underfillstructure 140 further cover vertical sidewalls of the semiconductordevice 100. In some alternative embodiments, the underfill structure 140may be omitted. In other words, the semiconductor device 100 may be abare die.

In some embodiments, a thermal interface material 110 is disposed on thesemiconductor device 100 to cover the semiconductor device 100. Thethermal interface material 110 may be electrically conductive materialsor electrically insulative materials. The thermal interface material 110includes a polymeric material (e.g., silicone and silica gel), a solderpaste (e.g., indium solder paste), or other film type material (e.g.,graphite and CNT). The method of forming the thermal interface material110 includes, for example, printing, dispensing, film lamination, or thelike. The thermal interface material 110 may be formed before or afterbonding the semiconductor device 100 onto the substrate 120.

Referring to FIGS. 1B and 2B, an adhesive material layer 150 is formedon the substrate 120 to surround the semiconductor device 100. In someembodiments, the adhesive material layer 150 is formed on the substrate120 after bonding the semiconductor device 100 onto the substrate 120.However, the disclosure is not limited thereto. In some alternativeembodiments, the adhesive material layer 150 is formed on the substrate120 before bonding the semiconductor device 100 onto the substrate 120.In some embodiments, the adhesive material layer 150 is formed foradhering of a heat spreader onto the substrate 120. The method offorming the adhesive material layer 150 includes, for example, printing,dispensing, film lamination, or the like.

In some embodiments, the materials of the adhesive material layer 150includes thermosetting polymer, thermoplastic polymer, or epoxy, and thedisclosure is not limited thereto. In some alternative embodiments, theadhesive material layer 150 may be any other suitable adhesive materialsas long as the attachment of the heat spreader onto the substrate 120may be achieved.

In some embodiments, the adhesive material layer 150 includes first tofourth adhesive parts 150 a-150 d arranged in sequence as shown in FIG.2B. The extending directions of the first to fourth adhesive parts 150a-150 d are respectively parallel with a corresponding adjacent sidewallof the substrate 120. In some embodiments, the extending directions ofthe first to fourth adhesive parts 150 a-150 d are respectively parallelwith the first to fourth sidewalls 120 a-120 d of the substrate 120. Awidth W1 of each of the first to fourth adhesive parts 150 a-150 d is ina range of 1000 μm to 20000 μm. A thickness T1 of each of the first tofourth adhesive parts 150 a-150 d is in a range of 50 μm to 100 μm. Insome embodiments, the width W1 of the first to fourth adhesive parts 150a-150 d may be substantially the same, and the thickness T1 of the firstto fourth adhesive parts 150 a-150 d may be substantially the same.

In some embodiments, the adhesive material layer 150 is a ring shapewith a first opening O1. The first opening O1 is disposed in the firstadhesive part 150 a and adjacent to the first sidewall 120 a of thesubstrate 120. A width W2 of the first opening O1 is in a range of 100μm to 10000 μm. A distance D5 between the first opening O1 and thesecond adhesive part 150 b is smaller than a distance D6 between thefirst opening O1 and the fourth adhesive part 150 d, for example. Inother words, the first opening O1 is not disposed at the middle of thefirst adhesive part 150 a. A distance between the middle of the firstopening O1 and the first corner C1 of the semiconductor device 100 islarger than a distance between the middle of the first opening O1 andthe second sidewall 100 b of the semiconductor device 100. That is, thefirst opening O1 is misaligned with the corner C1 of the semiconductordevice 100 which is the closest location of the semiconductor device 100to the first opening O1. Since the first opening O1 is misaligned withthe corner C1, the stress concentration point of the adhesive materiallayer 150 corresponding to the corner C1 of semiconductor device 100 maybe released. Therefore, the reliability failure of the adhesive layermay be prevented.

Referring to FIGS. 1C and 2C, a heat spreader 160 is disposed on thesubstrate 120 to cover the semiconductor device 100 and the thermalinterface material 110. That is, the semiconductor device 100 and thethermal interface material 110 are disposed between the heat spreader160 and the substrate 120. The heat spreader 160 is attached onto thesubstrate 120 through the adhesive material layer 150. In someembodiments, the heat spreader 160 is in direct contact with the thermalinterface material 110 located between the semiconductor device 100 andthe heat spreader 160, so as to enhance heat dissipation.

The heat spreader 160 may be a conductive lid as shown in FIG. 1C, awater cooling device, or a heatsink device. The heat spreader 160 may beformed from a material with high thermal conductivity, such as steel,stainless steel, copper, the like, or combinations thereof. In addition,the heat spreader 160 may be additionally coated with another metal suchas gold. In some embodiments, the heat spreader 160 is integrallyformed. However, in some alternative embodiments, the heat spreader 160are formed by a plurality of separated pieces.

In some embodiments, the heat spreader 160 includes a main portion 162and a supporting portion 164. The main portion 162 is substantiallycovering a top surface of the semiconductor device 100. In someembodiments, the main portion 162 is substantially parallel to the topsurface of the semiconductor device 100. The supporting portion 164 islocated between the main portion 162 and the adhesive material layer150. The supporting portion 164 is substantially perpendicular to themain portion 162. In some embodiments, a bottom of the supportingportion 164 is in contact with the adhesive material layer 150. A widthof the bottom of the supporting portion 164 is W, and a width W1 of theadhesive material layer 150 is ranging from 0.5 W to W, for example.

In some embodiments, the width W1 of the adhesive material layer 150 maybe increased after being pressed since the adhesive material layer 150may be pressed by the heat spreader 160 thereover. Therefore, in orderto avoid the adhesive material layer 150 being squeezed out of thebottom surface of the supporting portion 164 after placing the heatspreader 160 thereover, the width W1 of the adhesive material layer 150before being pressed is designed as being smaller than the width W ofthe supporting portion 164.

Referring to FIGS. 1D, the adhesive material layer 150 is cured to forman adhesive layer 150′. In some embodiments, the adhesive material layer150 may be cured by a heating process, and the heating process may beperformed at 100 degrees Celsius to 180 degrees Celsius. In someembodiments, the thermal interface material 110 may also be cured by theheating process. When the thermal interface material 110 is heated, agas may be released from the thermal interface material 110. The gas maybe water vapor or organic gas, for example. In this case, the firstopening O1 may serve as an outlet for the gas, that is, the gas may passthrough the first opening O1.

Then, a plurality of conductive terminals 170 are respectively formed onthe substrate 120. As illustrated in FIG. 1D, the conductive terminals170 are electrically connected to the connecting pads 124 of the circuitsubstrate 120, for example. In other words, the conductive terminals 170are electrically connected to the substrate 120 through the connectingpads 124. Through the connecting pads 122 and the connecting pads 124,some of the conductive terminals 170 are electrically connected to thesemiconductor device 100. In some embodiments, the conductive terminals170 are, for example, solder balls.

Base on above, a package structure 10 includes the adhesive layer 150′with the first opening O1. The first opening O1 is misaligned with thecorner C1 of semiconductor device 100, such that the stressconcentration point of the adhesive layer 150′ corresponding to thecorner C1 of semiconductor device 100 may be released. Therefore, thereliability failure of the adhesive layer 150 may be prevented.

FIG. 3A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure. FIG. 3Bis a schematic top view of the package structure in FIG. 3A, whereinFIG. 3A is a schematic cross-sectional view along lines II-II′ of FIG.3B. It should be noted that the heat spreader 160 in FIG. 3B is omitted.

A package structure 10A of FIG. 3A is similar to the package structure10 of FIG. 1D, hence the same reference numerals are used to refer tothe same and liked parts, and its detailed description will be omittedherein. The main difference lies in that the semiconductor device 100 ofthe package structure 10A includes a plurality of dies 106, aredistribution layer structure RDL1, and an insulating encapsulant 107.

Referring to FIGS. 3A and 3B, the dies 106 are encapsulated by theinsulating encapsulant 107. The die 106 may include a logic die (e.g. acentral processing unit (CPU) die, a graphics processing unit (GPU) die,a system-on-a-chip (SoC) die, a microcontroller or the like), a powermanagement die (e.g. a power management integrated circuit (PMIC) die orthe like), a memory die (e.g. a dynamic random access memory (DRAM) die,a static random access memory (SRAM) die, a high bandwidth memory (HBM)Bier the like), or combinations thereof. However, the disclosure is notlimited thereto, and the number, sizes and types of the dies 106 may beappropriately adjusted based on product requirement. In someembodiments, a material of the encapsulant 107 includes polymers (suchas epoxy resins, phenolic resins, silicon-containing resins, or othersuitable resins), dielectric materials having low permittivity (Dk) andlow loss tangent (Df) properties, or other suitable materials. In analternative embodiment, the encapsulant 107 may include an acceptableinsulating encapsulation material. In some embodiments, the encapsulant107 may further include inorganic filler or inorganic compound (e.g.silica, clay, and so on) which can be added therein to optimizecoefficient of thermal expansion (CTE) of the encapsulant 107. However,the disclosure is not limited thereto.

The redistribution layer structure RDL1 is formed on the encapsulant 107and the dies 106, and the redistribution layer structure RDL1 iselectrically connected with the dies 106. That is, the semiconductordevice 100 may be an integrated fan-out package. The redistributionlayer structure RDL1 includes a plurality of conductive patterns 108 anda plurality of dielectric layers 109 stacked alternately. In someembodiments, the formation of the redistribution layer structure RDL1may include sequentially forming a plurality of conductive patterns 108and a plurality of dielectric layers 109. In some embodiments, theconductive patterns 108 may be conductive lines and/or vias. In someembodiments, the outermost conductive pattern 108 is used as bondingpads, and the outermost conductive pattern 108 is located at a side ofthe redistribution layer structure RDL1 facing to the substrate 120.

In some embodiments, the redistribution layer structure RDL1 is attachedonto the substrate 120 by the electrical connectors 130. Through thereflow process, the connecting pads 122 and the outermost conductivepattern 108 are jointed to the electrical connectors 130, so as toelectrically connect the semiconductor device 100 and the substrate 120.

In some embodiments, the adhesive layer 150′ includes first to fourthadhesive parts 150 a-150 d arranged in sequence. The extendingdirections of the first to fourth adhesive parts 150 a-150 d arerespectively parallel with a corresponding adjacent sidewall of thesubstrate 120. In some embodiments, the extending directions of thefirst to fourth adhesive parts 150 a-150 d are respectively parallelwith the first to fourth sidewalls 120 a-120 d of the substrate 120. Awidth W1 of each of the first to fourth adhesive parts 150 a-150 d is ina range of 2000 μm to 10000 μm. A thickness T1 of each of the first tofourth adhesive parts 150 a-150 d is in a range of 50 μm to 100 μm.

In some embodiments, the adhesive layer 150 is a ring shape with a firstopening O1 and a second opening O2. The first opening O1 is disposed inthe first adhesive part 150 a and adjacent to the first sidewall 120 aof the substrate 120. The second opening O2 is disposed in the thirdadhesive part 150 c and adjacent to the third sidewall 120 c of thesubstrate 120. A width W2 of the first opening O1 and a width W3 of thesecond opening is in a range of 100 μm to 10000 μm. A distance D5between the first opening O1 and the second adhesive part 150 b issmaller than a distance D6 between the first opening O1 and the fourthadhesive part 150 d. A distance between the middle of the first openingO1 and the first corner C1 of the semiconductor device 100 is largerthan a distance between the middle of the first opening O1 and thesecond sidewall 100 b of the semiconductor device 100. That is, thefirst opening O1 is misaligned with the corner C1 of the semiconductordevice 100 which is the closest location of the semiconductor device 100to the first opening O1. A distance D8 between the second opening O2 andthe second adhesive part 150 b is greater than a distance D7 between thesecond opening O2 and the fourth adhesive part 150 d. A distance betweenthe middle of the second opening O2 and the third corner C3 of thesemiconductor device 100 is larger than a distance between the middle ofthe second opening O2 and the fourth sidewall 100 d of the semiconductordevice 100. That is, the second opening O2 is misaligned with the cornerC3 of the semiconductor device 100 which is the closest location of thesemiconductor device 100 to the second opening O2.

Since the first opening O1 is misaligned with the corner C1 and thesecond opening O2 is misaligned with the corner C3, the stressconcentration point of the adhesive layer corresponding to the cornersC1, C3 of semiconductor device 100 may be released. Therefore, thereliability failure of the adhesive layer may be prevented.

FIG. 4A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure. FIG. 4Bis a schematic top view of the package structure in FIG. 4A, whereinFIG. 4A is a schematic cross-sectional view along lines III-III′ of FIG.4B. It should be noted that the heat spreader 160 in FIG. 4B is omitted.

The package structure 10B of FIG. 4A is similar to the package structure10A of FIG. 3A, hence the same reference numerals are used to refer tothe same and liked parts, and its detailed description will be omittedherein. The main difference lies in that the semiconductor device 100 ofthe package structure 10B includes more than two dies 106 (for example,nine dies 106).

FIG. 5A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure. FIG. 5Bis a schematic top view of the package structure in FIG. 5A, whereinFIG. 5A is a schematic cross-sectional view along lines IV-IV′ of FIG.5B. It should be noted that the heat spreader 160 in FIG. 5B is omitted.

The package structure 10C of FIG. 5A is similar to the package structure10A of FIG. 3A, hence the same reference numerals are used to refer tothe same and liked parts, and its detailed description will be omittedherein. The main difference lies in that the semiconductor device 100 ofthe package structure 10C is a large-scale integration (LSI) packageincluding a plurality of dies 106, electrical connectors UB, aredistribution layer structure RDL1, an insulating encapsulant 107, andan interposer structure IP.

Referring to FIGS. 5A and 5B, the interposer structure IP includes acore portion CP, a plurality of vias TSV, a plurality of pads P1, and aplurality of pads P2. In some embodiments, the core portion CP mayinclude a bulk silicon substrate, such as a bulk substrate ofmonocrystalline silicon, a doped silicon substrate, an undoped siliconsubstrate, or a SOI substrate, where the dopant of the doped siliconsubstrate may be an N-type dopant, a P-type dopant or a combinationthereof. In some embodiments, the vias TSV is through silicon viaspenetrating the core portions CP.

The pads P1, and the pads P2 are formed on the opposite sides of thecore portion CP, respectively. The vias TSV are plated or filled withconductive material so as to electrically connect the pads P1 and thepads P2.

The dies 106 are electrically connected with the pads P1 through theelectrical connectors UB. Through the reflow process, the pads P1 andthe connecting pads 106 p of the dies 106 are jointed to the electricalconnectors UB, so as to electrically connecting the dies 106 to theinterposer structure IP. In one embodiment, the electrical connectors UBare micro-bumps, such as micro-bumps having copper metal pillars. Thepads P2 are electrically connected with the connecting pads 122 of thesubstrate 120.

The dies 106 and the interposer structure IP are covered by theinsulating encapsulant 107. Through mold vias TMV are formed through theencapsulant 107 on the dies 106. The through mold vias TMV are plated orfilled with conductive materials so as to electrically connect the dies106 to the connecting pads 122 of the substrate 120.

FIG. 6A schematically illustrates a cross-sectional view of a packagestructure in accordance with some embodiments of the disclosure. FIG. 6Bis a schematic top view of the package structure in FIG. 6A, whereinFIG. 6A is a schematic cross-sectional view along lines V-V′ of FIG. 6B.It should be noted that the heat spreader 160 in FIG. 5B is omitted.

The package structure 10D of FIG. 6A is similar to the package structure10C of FIG. 5A, hence the same reference numerals are used to refer tothe same and liked parts, and its detailed description will be omittedherein. The main difference lies in that the package structure 10D is achip on wafer on substrate (CoWoS) package.

Referring to FIGS. 6A and 6B, the semiconductor device 100 includes aplurality of dies 106, electrical connectors UB, an underfill structure140, an insulating encapsulant 107, and an interposer structure IP.

The interposer structure IP includes a core portion CP, a plurality ofvias TSV, a redistribution layer structure RDL2, and a redistributionlayer structure RDL3. Each of the redistribution layer structure RDL2and the redistribution layer structure RDL3 includes a plurality ofconductive patterns 108 and a plurality of dielectric layers 109 stackedalternately. The dies 106 are bonded onto the redistribution layerstructure RDL2 of the interposer structure IP through the electricalconnectors UB. A space between the electrical connectors UB is filledwith underfill structure 140. In some embodiments, more than two of thedies 106 with different size are bonded onto the interposer structureIP. However, the disclosure is not limited thereto, and the number,sizes and types of the dies 106 may be appropriately adjusted based onproduct requirement.

The insulating encapsulant 107 covers the dies 106, the underfillstructure 140, and the redistribution layer structure RDL2.

The redistribution layer structure RDL3 is attached onto the substrate120 through the electrical connectors 130. In one embodiment, theelectrical connectors 130 are solder bumps, lead-free solder bumps, ormicro bumps, such as controlled collapse chip connection (C4) bumps ormicro bumps containing copper pillars.

FIGS. 7A and 7B schematically illustrate top views for manufacturing apackage structure in accordance with some embodiments of the disclosure.

The package structure 10E of FIG. 7B is similar to the package structure10 of FIG. 2C, hence the same reference numerals are used to refer tothe same and liked parts, and its detailed description will be omittedherein. The main difference lies in that the manufacturing method of thepackage structure 10E further includes forming an adhesive materiallayer 180.

Referring to FIG. 7A, the adhesive material layer 150 is formed on thesubstrate 120 and surrounding the semiconductor device 100. The adhesivematerial layer 180 is formed on the substrate 120 and surrounding thesemiconductor device 100. In some embodiments, the adhesive materiallayer 180 includes first to fourth parts 180 a-180 d. The first tofourth parts 180 a-180 d are separated from each other and adjacent tothe corners C1-C4 of the semiconductor device 100, respectively. In someembodiments, the adhesive material layer 180 is located between thesemiconductor device 100 and the adhesive material layer 150. That is,the first part 180 a is located between the corner C1 and the middle ofthe first adhesive part 150 a, the second part 180 b is located betweenthe corner C2 and the middle of the second adhesive part 150 b, thethird part 180 c is located between the corner C3 and the middle of thethird adhesive part 150 c, and the fourth part 180 d is located betweenthe corner C4 and the middle of the fourth adhesive part 150 d. However,the disclosure is not limited thereto. In other embodiments, theadhesive material layer 150 is located between the semiconductor device100 and the adhesive material layer 180.

The method of forming the adhesive material layers 150, 180 includes,for example, printing, dispensing, film lamination, or the like. A widthW4 of each of the first to fourth adhesive parts 180 a-180 d is in arange of 100 μm to 2000 μm. A thickness of each of the first to fourthadhesive parts 180 a-180 d is in a range of 50 μm to 100 μm.

In some embodiments, the adhesive material layer 150 is a ring shapewith a first opening O1. The first opening O1 is disposed in the firstadhesive part 150 a and adjacent to the first sidewall 120 a of thesubstrate 120. A width W2 of the first opening O1 is in a range of 100μm to 10000 μm.

Referring to FIG. 7B, a heat spreader 160 is disposed on the substrate120 to cover the semiconductor device 100 and the thermal interfacematerial 110. The heat spreader 160 is attached onto the substrate 120through the adhesive material layers 150, 180.

After disposing the heat spreader 160, the adhesive material layer 150and the adhesive material layer 180 are connected together to form anadhesive material layer 150′ including first to fourth adhesive parts150 a′-150 d′. In some embodiments, a heating process is performed onthe adhesive material layer 150 so as to cure the adhesive materiallayer 150.

In some embodiments, the first adhesive part 150 a′ is formed from thefirst part 150 a of the adhesive material layer 150 and the first part180 a of the adhesive material layer 180. That is, a width X1 of themiddle of the first adhesive part 150 a′ corresponding to the first part180 a is greater than a width X2 of the adhesive layer 150′ adjacent tothe corners of the substrate 120. In some embodiments, the width X1 ofthe adhesive layer 150′ adjacent to the corner C1 of the semiconductordevice 100 is larger than a width X2 of the adhesive layer adjacent tothe first opening O1. Similarly, the second adhesive part 150 b′ isformed from the second part 150 b of the adhesive material layer 150 andthe second part 180 b of the adhesive material layer 180, the thirdadhesive part 150 c′ is formed from the third part 150 c of the adhesivematerial layer 150 and the third part 180 c of the adhesive materiallayer 180, the fourth adhesive part 150 d′ is formed from the fourthpart 150 d of the adhesive material layer 150 and the fourth part 180 dof the adhesive material layer 180. Widths of the middle of the secondto fourth adhesive part 150 b′-150 d′ (respectively adjacent to thecorners C2-C4 of the semiconductor device 100) are greater than a widthX2 of the adhesive layer 150′ adjacent to the corners of the substrate120.

Base on above, the adhesive layer 150′ adjacent to the corners of thesemiconductor device 100 has the width greater than the width of theadhesive layer 150′ adjacent to the corners of the substrate 120.Therefore, the stress concentration point of the adhesive layer 150′corresponding to the corners of semiconductor device 100 may bedispersed and the reliability failure of the adhesive layer may beprevented.

In some embodiments of the present disclosure, a package structureincludes a substrate, a semiconductor device, a heat spreader, and anadhesive layer. The semiconductor device is bonded onto the substrate,wherein an angle θ is formed between one sidewall of the semiconductordevice and one sidewall of the substrate, 0°<θ<90°. The heat spreader isdisposed over the substrate, wherein the semiconductor device isdisposed between the heat spreader and the substrate. The adhesive layeris surrounding the semiconductor device and attaching the heat spreaderonto the substrate, wherein the adhesive layer has a first openingmisaligned with one of corners of the semiconductor device closest tothe first opening.

In some embodiments of the present disclosure, a package structureincludes a substrate, a semiconductor device, an adhesive, and aconductive lid. The semiconductor device is bonded onto the substrate.The semiconductor device includes a first sidewall, a second sidewalland a corner formed between the first and second sidewalls, the corneris nearer to a sidewall of the substrate than to other sidewalls of thesubstrate. A shortest distance between the corner of the semiconductordevice and the sidewall of the substrate is smaller than a shortestdistance between each of the first sidewall and the second sidewall ofthe semiconductor device and the sidewall of the substrate. The adhesivelayer is surrounding the semiconductor device. The adhesive layer has afirst opening, and the first opening is adjacent to the sidewall of thesubstrate and misaligned with the corner of the semiconductor device.The conductive lid is attaching to the substrate by the adhesive layer.

In some embodiments of the present disclosure, a manufacturing method ofa package structure includes following steps. A semiconductor device isprovided. The semiconductor device is bonded onto a substrate, wherein ashortest distance between sidewalls of the substrate and corners of thesemiconductor device is smaller than a shortest distance betweensidewalls of the semiconductor device and sidewalls of the substrate. Athermal interface material is formed to cover the semiconductor device.An adhesive material layer surrounding the semiconductor device isformed, wherein the adhesive material layer has a first openingmisaligned with one of corners of the semiconductor device closest tothe first opening. A heat spreader is disposed to cover thesemiconductor device and the thermal interface material. The adhesivematerial layer is cured to form an adhesive layer.

In some embodiments of the present disclosure, a package structureincludes a substrate, a semiconductor device and an adhesive layer. Thesemiconductor device is disposed on the substrate, wherein an angle θ isformed between one sidewall of the semiconductor device and one of sidesof the substrate, 0°<θ<90°. The adhesive layer surrounds thesemiconductor device on the substrate and at least continuously disposedat two of the sides of the substrate, wherein the adhesive layer has afirst opening misaligned with a corner of the semiconductor deviceclosest to the first opening.

In some embodiments of the present disclosure, a package structureincludes a semiconductor device and an adhesive layer. The semiconductordevice is disposed on a substrate, wherein the semiconductor device hasa first diagonal and a second diagonal. The adhesive layer surrounds thesemiconductor device and is at least continuously disposed at two sidesof the substrate, wherein the adhesive layer has a first openingmisaligned with the first diagonal and the second diagonal of thesemiconductor device.

In some embodiments of the present disclosure, a package structureincludes a semiconductor device and an adhesive layer. The semiconductordevice is disposed on a substrate, wherein an angle θ is formed betweenone sidewall of the semiconductor device and a side of the substrate,0°<θ<90°. The adhesive layer surrounds the semiconductor device on thesubstrate, wherein a portion of the adhesive layer at the side of thesubstrate is nearest to a corner of the semiconductor device, and awidth of the portion of the adhesive layer is greater than a width ofother portions of the adhesive layer at the side of the substrate.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A package structure, comprising: a substrate; asemiconductor device on the substrate, wherein an angle θ is formedbetween one sidewall of the semiconductor device and one of sides of thesubstrate, 0°<74 <90°; and an adhesive layer, surrounding thesemiconductor device on the substrate and at least continuously disposedat two of the sides of the substrate, wherein the adhesive layer has afirst opening misaligned with a corner of the semiconductor deviceclosest to the first opening.
 2. The package structure as claimed inclaim 1, wherein the angle θ is about 45 degrees.
 3. The packagestructure as claimed in claim 1, wherein the adhesive layer iscontinuously disposed at first to fourth sides of the substrate, and thefirst opening of the adhesive layer is disposed at one of the first tofourth sides of the substrate.
 4. The package structure as claimed inclaim 1, wherein the adhesive layer has a first adhesive portioncontinuously disposed at first and second sides of the substrate and asecond adhesive portion continuously disposed at third and fourth sidesof the substrate, and the first opening of the adhesive layer isdisposed between the first adhesive portion and the second adhesiveportion.
 5. The package structure as claimed in claim 4, wherein theadhesive layer further comprises a second opening between the firstadhesive portion and the second adhesive portion.
 6. The packagestructure as claimed in claim 1, wherein the adhesive layer has a firstadhesive portion continuously disposed at a first side, a second sideand a third side of the substrate and a second adhesive portioncontinuously disposed at the first side, the third side and a fourthside opposite to the second side of the substrate, and the first openingof the adhesive layer is disposed between the first adhesive portion andthe second adhesive portion.
 7. A package structure, comprising: asemiconductor device on a substrate, wherein the semiconductor devicehas a first diagonal and a second diagonal; and an adhesive layersurrounding the semiconductor device and at least continuously disposedat two sides of the substrate, wherein the adhesive layer has a firstopening misaligned with the first diagonal and the second diagonal ofthe semiconductor device.
 8. The package structure as claimed in claim7, wherein the first diagonal and the second diagonal of thesemiconductor device are substantially overlapped with middle lines ofthe substrate.
 9. The package structure as claimed in claim 7, whereinthe substrate has first to fourth sides, and the first opening isdisposed at a corner formed by adjacent two of the first to fourth sidesof the substrate.
 10. The package structure as claimed in claim 7,wherein the substrate has first to fourth sides, and the first openingis disposed at one of the first to fourth sides of the substrate. 11.The package structure as claimed in claim 7 further comprising a heatspreader bonded to the substrate through the adhesive layer.
 12. Thepackage structure as claimed in claim 7, wherein the semiconductordevice comprises a plurality of dies, and the first opening ismisaligned with each diagonal of the dies.
 13. A package structure,comprising: a semiconductor device on a substrate, wherein an angle θ isformed between one sidewall of the semiconductor device and a side ofthe substrate, 0°<θ<90°; and an adhesive layer surrounding thesemiconductor device on the substrate, wherein a portion of the adhesivelayer at the side of the substrate is nearest to a corner of thesemiconductor device, and a width of the portion of the adhesive layeris greater than a width of other portions of the adhesive layer at theside of the substrate.
 14. The package structure as claimed in claim 13,wherein the adhesive layer has a first opening misaligned with thecorner of the semiconductor device.
 15. The package structure as claimedin claim 13, wherein a width of the adhesive layer decreases as adistance between the adhesive layer and the corner of the semiconductordevice becomes larger.
 16. The package structure as claimed in claim 13,wherein the portion of the adhesive layer comprises a first portion of amain adhesive part and an additional adhesive part between the firstportion of the main adhesive part and the semiconductor device, and theother portions of the adhesive layer comprise a second portionphysically connected to the first portion of the main adhesive part. 17.The package structure as claimed in claim 16, wherein the main adhesivepart has a constant width.
 18. The package structure as claimed in claim16, wherein the additional adhesive part has a constant width.
 19. Thepackage structure as claimed in claim 16, wherein the additionaladhesive part is separated from the main adhesive part.
 20. The packagestructure as claimed in claim 16, wherein the additional adhesive partis physically connected to the main adhesive part.